Author: Отахонова, Ш.Н.
Annotation: Recently, silicon doped with rare earth elements (REE) has attracted more and more attention of researchers as a promising material for electronics. This is due to the prospect of using Si <REE> structures in silicon electronics as devices.
Keywords: rare earth elements, rapidly diffusing impurities, concentration of charge carriers, gettering of Ni in silicon.
Kadirov Muhammadjon